Synchrotron Ultraviolet Radiation Facility(SURF)

  链接地址:https://www.nist.gov/laboratories/tools-instruments/synchrotron-ultraviolet-radiation-facility-surf-iii

  The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Ultraviolet Radiation Group as a stable light source for radiometry and research. SURF covers the wavelength range from the far infrared to the soft x-ray.

  Provides our National standards for UV and EUV radiometry

  Monitoring space weather and solar variability

  Advancing industrial uses – e.g. EUV microlithography, UV curing

  Provides continuum radiation from the soft x-ray to the infrared spectral regions, with ideal output for EUV studies related to solar physics and the development of EUV lithography

  Calculable irradiance traceable to the SI units to less than 1 % absolute uncertainty from 4 nm to 400 nm

  Beamlines equipped for detector, spectrometer, and lamp calibrations; reflectometry and transmission measurements; degradation and lifetime studies

  Carefully characterized and maintained source, operated in a clean hydrocarbon-free vacuum